Ion Implantation and Activation: Volume 3
Ion Implantation and Activation – Volume 3 presents the derivation process of related models in a comprehensive step by step manner starting from the fundamental processes and moving up into the more advanced theories.Ion implantation can be expressed theoretically as a binary collision, and, experimentally using various mathematical functions. Readers can understand how to establish an ion implantation database by combining theory and experimental data. The third volume of the series describes the diffusion phenomenon under the thermal equilibrium on point defect concentration and the features of transient enhanced diffusion (TED). The volume also presents methods for the oxidation and redistribution of impurities in polycrystalline silicon for extraction as well as some analytical models related to the VLSI process.This book provides advanced engineering and physics students and researchers with complete and coherent coverage of modern semiconductor process modeling. Readers can also benefit from this volume by acquiring the necessary information to improve contemporary process models by themselves.
List Price: $49.00 (Final bulk discount pricing is based on quantity)
Uh oh. It looks like this title is out of stock.
Did you know eBooks never run out? It's true. We have millions of titles available right now. You can download an eBook in seconds.
Why eBooks are the Smart Way to Go
Deep bulk discounts and $0 in shipping costs means you save big with bulk eBooks. Plus, eBooks are typically cheaper than print books.
Distribute your eBooks via text message, email, social media, and more using redeemable eBook codes. Users can get their eBook instantly.
Receive Readership Analytics & Redemption Reports for proven engagement and user data, including name and email address.
Want to make the smart switch to eBooks? CLICK HERE
Not convinced yet? No problem. We can still get you the print books you need. Fill out the request form below and a member of our sales team will be in touch quickly.
Request Bulk Purchase: